Detection of Charged Particles in Amorphous Silicon Layers

Low energy charged particles interacting with amorphous solid water layers.

The interaction of charged particles with condensed water films has been studied extensively in recent years due to its importance in biological systems, ecology as well as interstellar processes. We have studied low energy electrons (3-25 eV) and positive argon ions (55 eV) charging effects on amorphous solid water (ASW) and ice films, 120-1080 ML thick, deposited on ruthenium single crystal u...

Excimer Laser-Annealing of Amorphous Silicon Layers

This paper describes a one-dimensional model of excimer laser-annealing of amorphous silicon layers which are irradiated with a pulsed KrF excimer laser. For realisation of the model in COMSOL Multiphysics, the application mode heat transfer in solids is used. The model predicts a melt threshold for the energy density of the laser of Eth = 88.5 mJ/cm. It also predicts a linear increase of the m...

Solution-processed amorphous silicon surface passivation layers

Amorphous silicon thin films, fabricated by thermal conversion of neopentasilane, were used to passivate crystalline silicon surfaces. The conversion is investigated using X-ray and constant-final-state-yield photoelectron spectroscopy, and minority charge carrier lifetime spectroscopy. Liquid processed amorphous silicon exhibits high Urbach energies from 90 to 120 meV and 200 meV lower optical...

Morphology and hydrogen in passivating amorphous silicon layers

Hydrogenated intrinsic amorphous silicon ((i) a-Si:H) can be grown by plasma-enhanced chemical vapor deposition with a non-columnar or columnar morphology. Nuclear resonant reaction analysis and corresponding effective stopping cross section analysis indicate a dependency of hydrogen effusion on the morphology of the (i) a-Si:H layer as well as the doping type and concentration of the c-Si wafe...

PECVD Amorphous Silicon Carbide (α-SiC) Layers for MEMS Applications